Computational Lithography

Model Benchmarks

Reference numbers for the OPC/ILT baselines that ship with OpenLithoHub, evaluated on the synthetic-8 reference set. Submit your own model via the CLI — rankings are by Edge Placement Error (lower is better).

upload_file Submit via CLI

openlithohub leaderboard submit

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At a Glance

EPE lower-is-better · DRC: pass / fail / n/a

EPE Mean by Model (nm)

0.00 3.77 7.54 11.30 15.07 dummy-identity: EPE 0.00 nm · 45nm · DRC fail 0.00 dummy-identity LevelSet-ILT: EPE 0.04 nm · 45nm · DRC fail 0.04 LevelSet-ILT rule-based-opc: EPE 0.53 nm · 45nm · DRC fail 0.53 rule-based-opc Neural-ILT: EPE 15.07 nm · 45nm · DRC pass 15.07 Neural-ILT EPE Mean (nm)

Pareto Front · EPE Mean vs PV Band

0.00 3.96 7.91 11.87 15.82 0.00 0.66 1.31 1.97 2.63 dummy-identity: EPE 0.00 nm · PV 2.14 nm · 45nm dummy-identity LevelSet-ILT: EPE 0.04 nm · PV 2.13 nm · 45nm LevelSet-ILT rule-based-opc: EPE 0.53 nm · PV 2.49 nm · 45nm rule-based-opc Neural-ILT: EPE 15.07 nm · PV 2.50 nm · 45nm Neural-ILT EPE Mean (nm) PV Band (nm) Pareto front

Data source: src/data/leaderboard.json, regenerated from submissions/ in the OpenLithoHub repo. Charts render server-side as static SVG — no JS bundle, no third-party chart library.

Filters

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analytics Rankings
4 models
# Model Dataset Node EPE Mean (nm) EPE Max (nm) PV Band (nm) DRC Submitted
workspace_premium 01
dummy-identity manhattan
synthetic-8 45nm 0.00 0.00 2.14 Fail May 18, 2026
workspace_premium 02
LevelSet-ILT manhattan
synthetic-8 45nm 0.04 0.25 2.13 Fail May 18, 2026
workspace_premium 03
rule-based-opc manhattan
synthetic-8 45nm 0.53 1.41 2.49 Fail May 18, 2026
04
Neural-ILT manhattan
synthetic-8 45nm 15.07 24.64 2.50 Pass May 18, 2026

Submit Results

Use the CLI to submit your model's benchmark results to the public leaderboard.

openlithohub leaderboard submit --file results.json
terminal

Schema Reference

All submissions are validated against the BenchmarkResult schema with Pydantic.

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